pulsed RF ICP modelling
Hi, all, I am wondering if COMSOL is able to solve a pulsed RF ICP model or not , is there anybody got a example to show ? Thanks for your attention
View ArticleRe: pulsed RF ICP modelling
Suidong, Generally speaking, COMSOL should be able to solve pulsed ICP discharges in the same manner as continuous ICP discharges. To try it out, you can simply use the GEC ICP model in the Model...
View ArticleRe: pulsed RF ICP modelling
Hi, Luke, thanks for your reply. I found the detailed pulse shape ( on-level, off level, rising time and falling time) some time causes the software time dependent solver diverged. Do you have similar...
View ArticleRe: pulsed RF ICP modelling
Suidong, I've never tried it with an ICP discharge, but in general such waveforms can cause difficulties for the time-dependent solver when the rise and fall times are orders of magnitude smaller than...
View ArticleRe: pulsed RF ICP modelling
Luke, Have you done SF6 plasma modelling before ? I need some help on setting up SF6 chemistry cross-section data. Regards Suidong
View ArticleRe: pulsed RF ICP modelling
Suidong, I have not modeled SF6. LXCAT (fr.lxcat.net) has cross sections for SF6, which would be a good place to start. If you are solely interested in finding the conditions that produce breakdown,...
View Articlepulsed RF ICP modelling
Hi, all, I am wondering if COMSOL is able to solve a pulsed RF ICP model or not , is there anybody got a example to show ? Thanks for your attention
View ArticleRe: pulsed RF ICP modelling
Suidong, Generally speaking, COMSOL should be able to solve pulsed ICP discharges in the same manner as continuous ICP discharges. To try it out, you can simply use the GEC ICP model in the Model...
View ArticleRe: pulsed RF ICP modelling
Hi, Luke, thanks for your reply. I found the detailed pulse shape ( on-level, off level, rising time and falling time) some time causes the software time dependent solver diverged. Do you have similar...
View ArticleRe: pulsed RF ICP modelling
Suidong, I've never tried it with an ICP discharge, but in general such waveforms can cause difficulties for the time-dependent solver when the rise and fall times are orders of magnitude smaller than...
View ArticleRe: pulsed RF ICP modelling
Luke, Have you done SF6 plasma modelling before ? I need some help on setting up SF6 chemistry cross-section data. Regards Suidong
View ArticleRe: pulsed RF ICP modelling
Suidong, I have not modeled SF6. LXCAT (fr.lxcat.net) has cross sections for SF6, which would be a good place to start. If you are solely interested in finding the conditions that produce breakdown,...
View Articlepulsed RF ICP modelling
Hi, all, I am wondering if COMSOL is able to solve a pulsed RF ICP model or not , is there anybody got a example to show ? Thanks for your attention
View ArticleRe: pulsed RF ICP modelling
Suidong, Generally speaking, COMSOL should be able to solve pulsed ICP discharges in the same manner as continuous ICP discharges. To try it out, you can simply use the GEC ICP model in the Model...
View ArticleRe: pulsed RF ICP modelling
Hi, Luke, thanks for your reply. I found the detailed pulse shape ( on-level, off level, rising time and falling time) some time causes the software time dependent solver diverged. Do you have similar...
View ArticleRe: pulsed RF ICP modelling
Suidong, I've never tried it with an ICP discharge, but in general such waveforms can cause difficulties for the time-dependent solver when the rise and fall times are orders of magnitude smaller than...
View ArticleRe: pulsed RF ICP modelling
Luke, Have you done SF6 plasma modelling before ? I need some help on setting up SF6 chemistry cross-section data. Regards Suidong
View ArticleRe: pulsed RF ICP modelling
Suidong, I have not modeled SF6. LXCAT (fr.lxcat.net) has cross sections for SF6, which would be a good place to start. If you are solely interested in finding the conditions that produce breakdown,...
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